The method of diamond-like coatings (DLC) deposition in hydrocarbon gas discharge plasma has been developed. The resulted coatings possess a unique combination of physical and chemical properties (high hardness, low friction, high wear resistance, chemical inertness, biocompatibility, and transparency) and are intended for use as wear-resistant, protective and decorative coatings. The proposed method makes it possible to integrate the stages of the substrate surface ion sputtering with the transition layer formation and coating deposition, which, in combination with a high rate of the coating deposition on large surfaces, provides high engineering and economical performances of the DLC deposition process.

The plasma of pulsed non-self-sustained gas discharge sustained by electron emission from grid-stabilized plasma cathode was used for DLC deposition. The method provides an effective decomposition of hydrocarbon gases and high rate of diamond-like coatings deposition (1–10 µm/h) with high hardness (10–80 GPa) and low friction coefficient (up to 0.01) onto metal and alloys surfaces with a total area of up to 10⁴ cm². The principle of operation and design of the device ensure a long life time of all units and parts of the DLC deposition device (more than 10³ hours).